Manual exposure device
Alinea, which excels in productivity and usability, features automatic microscope movement and more.
This is a manual exposure device compatible with 2-inch wafers. It is an exposure device where the operator manually sets the wafer. Using a 4-inch glass mask, the alignment marks of the photomask and the wafer are imaged through a microscope, allowing for alignment and exposure gap settings while viewing the displayed image on a monitor. Additionally, when the exposure switch is pressed, the microscope automatically retracts, the lamp house moves to the designated position, and the exposure is performed with the set light intensity, followed by automatic retraction.
- Company：ウシオライティング
- Price：Other
